SEM Topography

Live quantitative surface topography in SEM from BSE signals

 

Benefits

Measure surface height/topography with SEM

• Use conventional segmented BSE signals
• Get immediate feedback with automated topographic reconstruction
• Save topographic data in standard surface file formats

Distinguish between sample composition and surface topography

• Resolve ambiguities in image interpretation
• Reach a wider audience with 3D models, visualisation and printing
• Measure 3D distances, volumes, steps, roughness, texture…

Monitor FIB milling and GIS deposition

• Improve yield of TEM and atom probe sample preparation
• Verify thickness of GIS deposited layers
• Monitor FIB milling depths and roughness

Visualise complex surfaces with ease

• Add texture from SE, EDS or EBSD maps
• Manipulate automatic colour textures
• Extract 3D screenshots for high-impact visualisation

Calibrate and measure heights

• Calibrate measurements with dedicated 3D calibration sample
• Measure 3D positions, distances and angles
• Measure and report height profiles

Continue live topography workflow with off-line analysis

• Import data into full feature analysis software
• Measure surface roughness and analyse texture
• Analyse morphology, grain and particle distributions