RF GENERATORS & MATCHING NETWORKS FOR MAGNETRON SPUTTERING

RF Generators / Matching Networks 100 W for RF bias and small sources 300 W, 600 W and 1000W for RF magnetron deposition Integral generator/matching network controller - minimal rack space Software specifically for magnetron sputtering - intuitive operation Programmable power limits  Cables included with either "N", "HN" or "7/16 DIN" coaxial connectors

DC GENERATORS FOR MAGNETRON SPUTTERING

DCXS-4 DC Generators 750 W and 1500 W Integral 4 way switchbox inside Intuitive interface specifically for magnetron sputtering Programmable with power limits, ramping, timing and shutter control

A3DC Generators (3) 600 W DC generators in one chassis Economical supply for systems requiring many DC supplies Interfaces with Labview Computer Control via I/O connection Passive front panel display

PULSED DC GENERATORS FOR MAGNETRON SPUTTERING

AE Pulsed DC Generators 1kW, 1.5kW and 5kW models Stable at 1% of full power 5kHz to 350 kHz variable in 5kHz increments True asymmetric bipolar pulsed power  350V to 800V

HIPIMS GENERATORS FOR IONIZED MAGNETRON SPUTTERING

HiPIMS Generators 10 kW, 1 MW peak power 1 kV, 1 kA, 1-500 Hz pulse frequency 400 VAC 3 phase input, 50/60 Hz RS-232, RS-485, analog interface Active front panel control DC unit, high power pulsar and cable matching unit