Substrate Holders - Heating

• Quartz lamp or SiC
• Substrate rotation and Z motion
• Programmable tilting
• RF/DC bias option
• Full O2 compatibility
• High efficiency 
• Water cooled shielding
• Substrate shutters (wedge, total)

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Substrate Holders - Cooling

• H2O and LN2 
• Substrate rotation and Z motion
• RF/DC bias option
• Backside He/N2/Ar gas cooling
• Programmable tilting
• Substrate shutters (wedge, total)

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Substrate Holders - Specialty

• Transverse magnetic field versions
• Programmable indexing spider 
• Heating/cooling combinations
• Combinatorial chemistry designs
• Scanning/rastering carriers
• Planetary designs for 3D parts coating

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