Stiletto Series HV Sources

• Stiletto Series Circular Sources 1"- 4"
  
• Stiletto Series Rectangular Sources
  
• End mounted - for tube coating
  
• Turrets and cluster flanges

A300 Series UHV Sources

• A300-XP UHV Sources 1.5"- 6"
  
• A310 1" UHV Sources
  
• CTM Series Sources
  
• Turrets and cluster flanges

A3CV Series UHV Sources

• Convertible target modules
  
• Specialty configurations

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STX & STXL Series Sources

• STX Series Circular Sources 5"-12"
  
• STXL Series Rectangular Sources 75mm x 300 mm to 150 mm x 1.0 m
  

Nautilus Rotating Magnet Sources

• Open magnet architecture flexibility for tailored uniformity optimization 

Cylindrical Target Sources

• For 360° immersion coating

Triangular Target Sources

• For 200 mm wafer batch coating

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